Wafer Cleaning Equipment Market by Equipment Type (Single-Wafer Spray Systems, Single-Wafer Cryogenic Systems, Batch Immersion Cleaning Systems, Batch Spray Cleaning Systems, and Scrubbers), Application, Wafer Size, and Geography - Global Forecast to 2022

The wafer cleaning market is expected to be valued at USD 5.03 Billion by 2022, growing at a CAGR of 6.2% during the forecast period. In this report, 2015 has been considered as the base year, and the period between 2016 and 2022 has been considered as the forecast period for the wafer cleaning market study.

The objective of the study is to define, describe, and forecast the global market on the basis of equipment type, wafer size, application, and geography. The wafer cleaning equipment market has been segmented on the basis of geography into North America, Europe, and Asia-Pacific. Additionally, the report provides detailed information regarding major factors influencing the growth of the market (drivers, restraints, opportunities, and industry-specific challenges). The opportunities have been analyzed for stakeholders by identifying the high-growth segments of the global market. The report also profiles key players and comprehensively analyzes their market ranking and core competencies, along with detailing the competitive landscape.

This research study involves an extensive usage of secondary sources, directories, and databases (Factiva and OneSource) to identify and collect information useful for technical, market-oriented, and commercial aspects of wafer cleaning equipment technology. Top-down and bottom-up approaches have been implemented to arrive at the size of the wafer cleaning equipment market. The points below explain the research methodology applied:

• The study of annual and financial reports of top players, presentations, press releases, journals, paid databases, and interviews with industry experts
• Analysis of the opportunities in the market for stakeholders by identifying high-growth segments
• Analyzing competitive developments such as mergers and acquisitions, new product launches and developments, and research and development
• Carrying out primary and secondary research to derive all the percentage splits and segment breakdown of the market

The figure below shows the breakdown of primaries on the basis of companies, designations, and regions, conducted during the research study.

To know about the assumptions considered for the study, download the pdf brochure

Market Ecosystem:

The wafer cleaning market comprises key manufacturers such as SCREEN Holdings Co., Ltd. (Japan), Tokyo Electron Limited (Japan), Lam Research Corporation (U.S.), Applied Materials, Inc. (U.S.), SEMES Co., Ltd.(Korea), Modutek Corporation (U.S.), Shibaura Mechatronics Corporation (Japan), PVA TePla AG (Germany), and Entegris, Inc. (U.S.), among others.

Target Audience:

• Wafer cleaning equipment manufacturers
• Semiconductor manufacturers
• Research organizations and consulting companies
• Investors

“Study answers several questions for the target audiences, primarily which segments to focus in the next two to five years for prioritizing the efforts and investments.”

Scope of the Report:

This report categorizes the global market for wafer cleaning equipment market on the basis of equipment type, application, wafer size, and geographical regions.

Market on the Basis of Equipment Type:

• Single-wafer spray systems
• Single-wafer cryogenic systems
• Batch immersion cleaning systems
• Batch spray cleaning systems
• Scrubbers

Wafer Market on the Basis of Application:

• MEMS
• CIS
• Memory
• RF Device
• LED
• Interposer
• Logic

Wafer Market on the Basis of Wafer Size:

• 125MM
• 200MM
• 300MM

Market on the Basis of Region:

• Introduction
• North America
  • U.S.
  • Canada and Mexico
• Europe
  • Germany
  • France
  • Italy
  • U.K.
  • Israel
  • Ireland
  • Rest of Europe
• Asia-pacific (APAC)
  • Taiwan
  • China
  • Japan
  • Singapore
  • South Korea
  • Rest of APAC

Available Customizations

With the given market data, MarketsandMarkets offers customizations according to the company’s specific needs. The following customization options are available for the report:

Company Information

Detailed analysis and profiling of additional market players (up to 10)

Table of Contents

1 Introduction (Page No. - 14)
    1.1 Objectives of the Study
    1.2 Market Definition
    1.3 Scope of the Study
           1.3.1 Markets Covered
           1.3.2 Years Considered for the Study
    1.4 Currency
    1.5 Package Size
    1.6 Limitations
    1.7 Stakeholders

2 Research Methodology (Page No. - 17)
    2.1 Research Data
           2.1.1 Secondary Data
                    2.1.1.1 List of Major Secondary Sources
                    2.1.1.2 Key Data From Secondary Sources
           2.1.2 Primary Data
                    2.1.2.1 Breakdown of Primaries
                    2.1.2.2 Key Data From Primary Sources
                    2.1.2.3 Secondary and Primary Research
                    2.1.2.4 Key Industry Insight
    2.2 Market Size Estimation
           2.2.1 Bottom-Up Approach
                    2.2.1.1 Approach for Capturing the Market Share By Bottom-Up Analysis (Demand Side)
           2.2.2 Top-Down Approach
                    2.2.2.1 Approach for Capturing the Market Share By Top-Down Analysis (Supply Side)
    2.3 Market Breakdown and Data Triangulation
    2.4 Research Assumption

3 Executive Summary (Page No. - 28)

4 Premium Insights (Page No. - 34)
    4.1 Attractive Growth Opportunities in the Wafer Cleaning Equipment Market
    4.2 Wafer Market, By Application
    4.3 Wafer Cleaning Equipment Market in Asia-Pacific
    4.4 Wafer Market, By Wafer Size

5 Market Overview (Page No. - 36)
    5.1 Introduction
    5.2 Market Segmentation
           5.2.1 By Application
           5.2.2 By Wafer Size
           5.2.3 By Equipment Type
           5.2.4 By Geography
    5.3 Market Dynamics
           5.3.1 Drivers
                    5.3.1.1 Rise in Conventional Applications of Micro-Electromechanical Systems
                    5.3.1.2 Expansion in the Number of Cleaning Steps in the Wafer Manufacturing Industry
           5.3.2 Restraints
                    5.3.2.1 Environmental Concerns Related to Hazardous Chemicals and Gases Generated During Wafer Cleaning Process
           5.3.3 Opportunities
                    5.3.3.1 Increasing Demand for Silicon-Based Sensors in IoT
                    5.3.3.2 Increasing Demand for Wafers in 3D Structure
           5.3.4 Challenges
                    5.3.4.1 Increasing Complexities Related to Miniaturized Structures of Circuits
                    5.3.4.2 Concerns About Compatible Materials and Toxic Chemicals Emitted During Wafer Cleaning

6 Industry Trends (Page No. - 42)
    6.1 Introduction
    6.2 Value Chain Analysis
    6.3 Porter’s Five Force Analysis
           6.3.1 Threat of Substitutes
           6.3.2 Bargaining Power of Suppliers
           6.3.3 Bargaining Power of Buyers
           6.3.4 Intensity of Competitive Rivalry
           6.3.5 Threat of New Entrants

7 Technologies and Processes Used in Wafer Cleaning Equipment (Page No. - 49)
    7.1 Introduction
    7.2 Wet Chemical Cleaning Process
           7.2.1 HF Acid Solution
           7.2.2 Sulfuric Acid Solutions
           7.2.3 RCA Cleaning Process
           7.2.4 Alternative Cleaning Solution
    7.3 Vapor Dry Cleaning Process
           7.3.1 Vapor Phase Cleaning Process
           7.3.2 Plasma Stripping and Cleaning
    7.4 Aqueous Cleaning Process
           7.4.1 Aqueous Feol Cleaning Process
           7.4.2 Aqueous Beol Cleaning Process
    7.5 Cryogenic Aerosols and Super-Critical Fluid Cleaning
    7.6 Emerging Technologies
           7.6.1 Laser Cleaning
                    7.6.1.1 Dry Laser Cleaning
                    7.6.1.2 Steam Laser Cleaning
           7.6.2 Aqueous-Based Emerging Technologies
                    7.6.2.1 Foam/Bubble Cleaning
                    7.6.2.2 Immersion Pressure Pulsation Cleaning
                    7.6.2.3 Spray Pressure Pulsation Cleaning
           7.6.3 Chemical-Based Emerging Technologies
           7.6.4 Dry Particle Removal
                    7.6.4.1 Liquid Clusters
                    7.6.4.2 Nano Probe Cleaning

8 Operating Mode of Wafer Cleaning Equipment (Page No. - 57)
    8.1 Introduction
    8.2 Automatic Equipment
    8.3 Semi-Automatic Equipment
    8.4 Manual Equipment

9 Wafer Market, By Wafer Size (Page No. - 60)
    9.1 Introduction
    9.2 125mm
    9.3 200mm
    9.4 300mm

10 Wafer Market, By Application (Page No. - 66)
     10.1 Introduction
     10.2 MEMS
     10.3 CIS
     10.4 Memory
     10.5 RF Device
     10.6 LED
     10.7 Interposer
     10.8 Logic
     10.9 Others

11 Wafer Cleaning Equipment Market, By Equipment Type (Page No. - 74)
     11.1 Introduction
     11.2 Single-Wafer Spray Systems
     11.3 Single-Wafer Cryogenic Systems
     11.4 Batch Immersion Cleaning Systems
     11.5 Batch Spray Cleaning Systems
     11.6 Scrubbers

12 Wafer Cleaning Equipment Market, By Geography (Page No. - 89)
     12.1 Introduction
     12.2 North America
             12.2.1 U.S.
             12.2.2 Canada and Mexico
     12.3 Europe
             12.3.1 Germany
             12.3.2 U.K.
             12.3.3 Italy
             12.3.4 Ireland
             12.3.5 Israel
             12.3.6 France
             12.3.7 Rest of Europe
     12.4 Asia-Pacific
             12.4.1 China
             12.4.2 Japan
             12.4.3 Taiwan
             12.4.4 Singapore
             12.4.5 South Korea
             12.4.6 Rest of Asia-Pacific

13 Competitive Landscape (Page No. - 107)
     13.1 Introduction
     13.2 Market Ranking Analysis: Wafer Cleaning Equipment Market
     13.3 Competitive Analysis
     13.4 Recent Developments
             13.4.1 New Product Launches and Developments
             13.4.2 Partnerships, Collaborations, Agreements, and Expansions
             13.4.3 Mergers and Acquisitions
             13.4.4 Awards Strategies

14 Company Profile (Page No. - 115)
     14.1 Introduction
(Business Overview, Products & Services, Key Insights, Recent Developments, SWOT Analysis, Ratio Analysis, MnM View)*
     14.2 Screen Holdings Co., Ltd.
     14.3 Tokyo Electron Limited
     14.4 Lam Research Corporation
     14.5 Applied Materials, Inc.
     14.6 Semes Co., Ltd.
     14.7 Modutek Corporation
     14.8 Shibaura Mechatronics Corporation
     14.9 PVA Tepla AG
     14.10 Entegris, Inc.
     14.11 Veeco Instruments Inc.

*Details on Business Overview, Products & Services, Key Insights, Recent Developments, SWOT Analysis, MnM View Might Not Be Captured in Case of Unlisted Companies.

15 Appendix (Page No. - 139)
     15.1 Insights of Industry Experts
     15.2 Discussion Guide:
     15.3 Knowledge Store: Marketsandmarkets’ Subscription Portal
     15.4 Introducing RT: Real-Time Market Intelligence
     15.5 Available Customization
     15.6 Related Reports
     15.7 Author Details

List of Tables (65 Tables)

Table 1 Wafer Market and Wafer Cleaning Equipment, 2013-2022
Table 2 Wafer Market, By Wafer Size, 2013–2022 (Million Square Inches)
Table 3 Market for 125mm Wafers, By Application, 2013–2022 (Million Square Inches)
Table 4 Market for 200mm Wafers, By Application, 2013–2022 (Million Square Inches)
Table 5 Market for 300mm Wafers, By Application, 2013–2022 (Million Square Inches)
Table 6 Wafer Market, By Application, 2013–2022 (Million Square Inches)
Table 7 Wafer Market for MEMS Devices, By Wafer Size, 2013–2022 (Million Square Inches)
Table 8 Wafer Market for CIS Application , By Wafer Size, 2013–2022 (Million Square Inches)
Table 9 Wafer Market for Memory Devices, By Wafer Size, 2013–2022 (Million Square Inches)
Table 10 Wafer Market for RF Devices, By Wafer Size, 2013–2022 (Million Square Inches)
Table 11 Wafer Market for LED Devices, By Wafer Size, 2013–2022 (Million Square Inches)
Table 12 Wafer Market for Interposers, By Wafer Size, 2013–2022 (Million Square Inches)
Table 13 Wafer Market for Logic Devices, By Wafer Size, 2013–2022 (Million Square Inches)
Table 14 Wafer Market for Other Applications, By Wafer Size, 2013–2022 (Million Square Inches)
Table 15 Wafer Cleaning Equipment Market, By Equipment Type, 2013–2022 (USD Million)
Table 16 Single Wafer Spray System Market, By Application, 2013-2022 (USD Million)
Table 17 Wafer Cleaning Equipment Market for Single-Wafer Spray Systems, By Region, 2013–2022 (USD Million)
Table 18 Wafer Cleaning Equipment Market in North America for Single-Wafer Spray Systems, By Country, 2013–2022 (USD Million)
Table 19 Wafer Cleaning Equipment Market in Europe for Single-Wafer Spray Systems, By Country, 2013–2022 (USD Million)
Table 20 Wafer Cleaning Equipment Market in APAC for Single-Wafer Spray Systems, By Country, 2013–2022 (USD Million)
Table 21 Single Wafer Cryogenic Systems Market, By Application, 2013-2022 (USD Million)
Table 22 Wafer Cleaning Equipment Market for Single-Wafer Cryogenic Systems, By Region, 2013–2022 (USD Million)
Table 23 Wafer Cleaning Equipment Market in North America for Single-Wafer Cryogenic Systems, By Country, 2013–2022 (USD Million)
Table 24 Wafer Cleaning Equipment Market in Europe for Single-Wafer Cryogenic Systems, By Country, 2013–2022 (USD Million)
Table 25 Wafer Cleaning Equipment Market in APAC for Single-Wafer Cryogenic Systems, By Country, 2013–2022 (USD Million)
Table 26 Batch Immersion Cleaning System Market, By Application, 2013–2022 (USD Million)
Table 27 Wafer Cleaning Equipment Market for Batch Immersion Cleaning Systems, By Region, 2013–2022 (USD Million)
Table 28 Wafer Cleaning Equipment in North America for Batch Immersion Cleaning Systems, By Country, 2013–2022 (USD Million)
Table 29 Wafer Cleaning Equipment Market in Europe for Batch Immersion Cleaning Systems, By Country, 2013–2022 (USD Million)
Table 30 Wafer Cleaning Equipment Market in APAC for Batch Immersion Cleaning Systems, By Country, 2013–2022 (USD Million)
Table 31 Wafer Cleaning Equipment Market for Batch Spray Cleaning Systems, By Region, 2013–2022 (USD Million)
Table 32 Wafer Cleaning Equipment Market in North America for Batch Spray Cleaning Systems, By Country, 2013–2022 (USD Million)
Table 33 Wafer Cleaning Equipment Market in Europe for Batch Spray Cleaning Systems, By Country, 2013–2022 (USD Million)
Table 34 Wafer Cleaning Equipment Market in APAC for Batch Spray Cleaning Systems, By Country, 2013–2022 (USD Million)
Table 35 Wafer Cleaning Equipment Market for Scrubbers , By Region, 2013–2022 (USD Million)
Table 36 Wafer Cleaning Equipment Market in North America for Scrubber Cleaning Systems, By Country, 2013–2022 (USD Million)
Table 37 Wafer Cleaning Equipment Market in Europe for Scrubbers, By Country, 2013–2022 (USD Million)
Table 38 Wafer Cleaning Equipment Market in APAC for Scrubber Cleaning Systems, By Country, 2013–2022 (USD Million)
Table 39 Wafer Cleaning Equipment Market, By Region, 2013–2022 (USD Million)
Table 40 Wafer Cleaning Equipment Market in North America, By Equipment Type, 2013–2022 (USD Million)
Table 41 Wafer Cleaning Equipment Market in North America, By Country, 2013–2022 (USD Million)
Table 42 Wafer Cleaning Equipment Market in U.S., By Equipment Type, 2013–2022 (USD Million)
Table 43 Wafer Cleaning Equipment Market in Canada and Mexico, By Equipment Type, 2013–2022 (USD Million)
Table 44 Wafer Cleaning Equipment Market in Europe, By Equipment Type, 2013–2022 (USD Million)
Table 45 Wafer Cleaning Equipment Market in Europe, By Country, 2013–2022 (USD Million)
Table 46 Wafer Cleaning Equipment Market in Germany, By Equipment Type, 2013–2022 (USD Million)
Table 47 Wafer Cleaning Equipment Market in U.K., By Equipment Type, By Equipment Type, 2013–2022 (USD Million)
Table 48 Wafer Cleaning Equipment Market in Italy, By Equipment Type, 2013–2022 (USD Million)
Table 49 Wafer Cleaning Equipment Market in Ireland, By Equipment Type, 2013–2022 (USD Million)
Table 50 Wafer Cleaning Equipment Market in Israel, By Equipment Type, 2013–2022 (USD Million)
Table 51 Wafer Cleaning Equipment Market France, By Equipment Type, 2013–2022 (USD Million)
Table 52 Wafer Cleaning Equipment Market Rest of Europe, By Equipment Type, 2013–2022 (USD Million)
Table 53 Wafer Cleaning Equipment Market in APAC, By Equipment Type, 2013–2022 (USD Million)
Table 54 Wafer Cleaning Equipment in APAC, By Country, 2013–2022 (USD Million)
Table 55 Wafer Cleaning Equipment Market in China, By Equipment Type, 2013–2022 (USD Million)
Table 56 Wafer Cleaning Equipment Market in Japan, By Equipment Type, 2013–2022 (USD Million)
Table 57 Wafer Cleaning Equipment Market in Taiwan, By Equipment Type, 2013–2022 (USD Million)
Table 58 Wafer Cleaning Equipment Market in Singapore, By Equipment Type, 2013–2022 (USD Million)
Table 59 Wafer Cleaning Equipment Market in South Korea, By Equipment Type, 2013–2022 (USD Million)
Table 60 Wafer Cleaning Equipment Market Rest of APAC, By Equipment Type, 2013–2022 (USD Million)
Table 61 Ranking of Top 5 Players in the Wafer Cleaning Equipment Market
Table 62 New Product Launches and Developments, 2013–2016
Table 63 Partnerships, Collaborations, Agreements, and Expansions, 2013–2016
Table 64 Mergers and Acquisitions, 2012–2015
Table 65 Other Strategies, 2014–2016

List of Figures (49 Figures)

Figure 1 Market Segmentation
Figure 2 Wafer Cleaning Equipment Market Report: Research Design
Figure 3 Bottom-Up Approach to Arrive at the Market Size
Figure 4 Top-Down Approach to Arrive at the Market Size
Figure 5 Data Triangulation
Figure 6 Assumption of the Research Study
Figure 7 Batch Spray Cleaning Systems Expected to Hold the Largest Size of the Wafer Cleaning Equipment Market Between 2016 and 2022
Figure 8 Market for Wafers With the Size of 300mm Expected to Witness the Highest Growth Rate During the Forecast Period
Figure 9 APAC to Dominate the Wafer Cleaning Equipment Market During the Forecast Period
Figure 10 Wafer Market Size, 2016 vs 2022
Figure 11 Market for Single Wafer Spray Systems Expected to Grow at the Highest Rate Between 2016 and 2022
Figure 12 APAC Held the Largest Share of the Wafer Cleaning Equipment Market in 2015
Figure 13 Rise in Conventional Applications of MEMS and Expansion in the Number of Cleaning Steps in the Wafer Manufacturing Industry are the Major Drivers for the Market Growth During the Forecast Period
Figure 14 Memory Held the Largest Size of the Wafer Market in 2015
Figure 15 Batch Spray Cleaning Systems Held the Largest Share of the Wafer Cleaning Equipment Market Based on Equipment Type in Asia-Pacific in 2015
Figure 16 Market for 300mm Wafers Expected to Grow at the Highest Rate Between 2016 and 2022
Figure 17 Wafer Cleaning Equipment Market, By Geography
Figure 18 Market Dynamics
Figure 19 Porter’s Five Force Analysis
Figure 20 Wafer Cleaning Equipment Market: Threat of Substitutes
Figure 21 Wafer Cleaning Equipment Market: Bargaining Power of Suppliers
Figure 22 Wafer Cleaning Equipment Market: Bargaining Power of Buyers
Figure 23 Wafer Cleaning Equipment Market: Intensity of Competitive Rivalry
Figure 24 Wafer Cleaning Equipment Market: Threat of New Entrants
Figure 25 Wet Clean Process
Figure 26 Standard Wafer Cleaning Process
Figure 27 Market for 300mm Wafers Expected to Grow at the Highest Rate During the Forecast Period
Figure 28 300mm Wafer Market for the LED Application to Grow at the Highest Rate During the Forecast Period
Figure 29 Wafer Market for LED Application Expected to Grow at the Highest Rate During the Forecast Period
Figure 30 300mm Wafer Market for LED Application Expected to Grow at the Highest Rate During the Forecast Period
Figure 31 Wafer Cleaning Equipment Market: Geographic Snapshot, 2016–2022
Figure 32 North America: Geographic Snapshot, 2015
Figure 33 APAC: Geographic Snapshot, 2015
Figure 34 Companies Adopted New Product Launches and Developments as the Key Growth Strategy Between 2013 and 2016
Figure 35 Battle for Market Share: New Product Launches and Developments Were the Key Strategies Adopted By the Companies
Figure 36 Geographic Revenue Mix of Major Companies
Figure 37 Screen Holdings Co., Ltd.: Company Snapshot
Figure 38 Screen Holdings Co., Ltd.: SWOT Analysis
Figure 39 Tokyo Electron Limited: Company Snapshot
Figure 40 Tokyo Electron Limited: SWOT Analysis
Figure 41 Lam Research Corporation: Company Snapshot
Figure 42 Lam Research Corporation: SWOT Analysis
Figure 43 Applied Materials, Inc.: Company Snapshot
Figure 44 Applied Materials, Inc.: SWOT Analysis
Figure 45 Shibaura Mechatronics Corporation: Company Snapshot
Figure 46 Shibaura Mechatronics Corporation: SWOT Analysis
Figure 47 PVA Tepla AG: Company Snapshot
Figure 48 Entegris, Inc.: Company Snapshot
Figure 49 Veeco Instruments Inc.: Company Snapshot

The wafer cleaning equipment market is expected to grow at a CAGR of 6.2% between 2016 and 2022 and be valued at USD 5.03 Billion by 2022.  A wide range of semiconductor applications uses wafer cleaning equipment such as MEMS, CIS, memory, RF devices, LED, interposers, logic, and others. These equipment clean silicon wafer surfaces and make them suitable for semiconductor applications; this helps electronic products to deliver better workability. Also, the growing application of memory in the smart devices is driving the growth of the overall market.

This market is segmented on the basis of equipment type, wafer size, application, and geography. The equipment include single-wafer spray systems, single-wafer cryogenic systems, batch immersion cleaning systems, batch spray cleaning systems, and scrubbers. Amongst all these equipment, batch spray cleaning systems held the largest market share in 2015 due to its increasing demand in MEMS manufacturing

The market for single-wafer spray systems is expected to grow at a rapid pace. Increasing demand for single-wafer spray systems can be attributed to device miniaturization and complex fabrication steps that require high precision that can only be delivered by single-wafer spray systems.

LED application is expected to grow at the highest rate due to rise in LEDs demand across the globe. The market for LEDs is increasing significantly. The rise in demand for LEDs can be attributed to the growing demand for commercial use of LEDs. The market for 300mm wafers is expected to grow at the highest rate during the forecast period. The electronics manufacturers choose 300mm wafers because they offer the ability to manufacture a large number of devices in a single batch.

Currently, the APAC region holds the largest share and is expected to witness the highest growth rate between 2016 and 2022. APAC dominates the wafer cleaning equipment market, owing to low-cost labor in China, innovations and advancements in FABS in Taiwan, and semiconductor equipment manufacturing capabilities in Japan are some of the cutting-edge advantages for Asian semiconductor industries. The governments in many countries in Asia are supporting the semiconductor industry. The increase in foreign investment in the semiconductor industry in the region would also help in market growth. These are the major reasons for APAC being the largest market for wafer cleaning equipment.

The environmental concerns related to hazardous chemicals is the major restraint for the growth of the wafer cleaning equipment market. For the process of wafer cleaning, several chemicals are required, which is harmful to the environment as well as for human beings. Some of the chemicals used are H2O2 (hydrogen peroxide), HCl (hydrochloric acid), and HF (hydrofluoric acid); these all chemicals are very harmful and dangerous and are to be used with standard precaution. However, many ongoing research and development projects are there to reduce the overall use of harmful chemicals in wafer cleaning that would help to increase the adoption rate in the market.

SCREEN Holdings Co., Ltd., one of the major players, focuses on the development of their product line through the growth strategies such as collaborations and new product launches and developments. In 2016, SCREEN collaborated with IBM Research (U.S.) for the advanced logic process research. Recently, the company also expanded its research and development by collaborating with Imec Technology Forum Japan (Tokyo, Japan); this alliance would focus on cleaning, wet etch, and advanced lithography coat/develop processing. The company is also focusing on the development of its wafer cleaning products. In 2016, the company launched the single-wafer cleaning system SU-3300 and in 2015, SS-80EX—the wafer cleaning system with spin scrubbers.

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